A Global Basis Function Approach to DC Glow Discharge Simulation Yi - hung

نویسندگان

  • R. Adomaitis
  • Raymond A. Adomaitis
چکیده

A global discretization approach was taken to solve a self-consistent DC glow discharge model to study the interplay between modeling assumptions and convergence of the numerical solution techniques. It was found that the assumed form of electron di usivity temperature dependence had a profound in uence on the computed solutions. The numerical techniques developed o er a simple to implement alternative for plasma model discretization. keywords: Collocation; Continuation; Global basis functions; Glow discharge; Plasma processing; Pseudospectral

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تاریخ انتشار 1997